ASML, the Veldhoven-based supplier of equipment to the world’s chipmakers, reported second-quarter net income of  €584m up from €466m in the year-earlier period. Sales surged 30% to €2.74bn, the company said in a statement on Wednesday.

ASML chief Peter Volgens topman Peter Wennink termed the results ‘excellent’ as sales of its new EUV (extreme ultraviolet lithography) systems topped expectations. These latest-generation EUV machines make details on chips even smaller.

The process is carried out in a vacuum using a plasma to produce EUV light via highly sophisticated mirrors instead of lenses to project the circuit patterns onto silicon wafers. Today’s silicon chips have features as small as 40 nanometers – less than a few hundred atoms across.

EUV systems sell for more than €100m. Wennink said ASML is on course to sell 20 this year and is targeting 30 sales in 2019. ASML customers include Intel, Samsung and TSMC.