NEO 2000UV to address the lack of available UV curing/charge erase
systems and offer longer term perspective to IC manufacturers
NIJMEGEN, Netherlands–(BUSINESS WIRE)–Trymax Semiconductor Equipment BV (Trymax), a global leader in plasma
solutions for semiconductor manufacturers, announces the addition of an
ultraviolet (UV) curing and charge erase product line to its portfolio.
The system called NEO 2000UV is a leading-edge dual chamber solution
compliant with wafer sizes up to 200mm.
UV curing and charge erase equipment are used for a wide range of
applications that includes photo-stabilization of the resist prior
implantation or etch, for small CD, or to erase charge built-up during
the IC manufacturing process. This new offer from Trymax will contribute
to support the 200mm wafer capacity increase over the period 2019-2022
forecasted by SEMI in its latest report*.
The decision of Trymax to develop such new product was based on the
market demand. Several IC fabs were facing difficulties to find UV
curing/charge erase equipment to expand their manufacturing capacity or
simply maintain their existing toolset. Customers had to rely mainly on
the rarely available refurbished equipment and parts.
“By launching NEO 2000UV, Trymax offers longer term perspective to IC
manufacturers”, stated Ludo Vandenberk, Executive Vice President of
Trymax. “This new product line extends Trymax capabilities to support
the semiconductor industry and will generate value for customer by
enabling higher yield in wafer manufacturing.”
NEO 2000UV has been designed taking advantage of the reliable NEO
platforms developed by Trymax for plasma ashing, descum, and etching
applications. NEO 2000UV is implementing state-of-the-art robotics,
components, the latest digital technologies and software, and is CE
compliant. NEO 2000UV can accommodate cassettes or SMIFs. It is
manufactured in the Netherlands.
First shipments of pre-ordered systems will start in early Q3 2019.
Customers interested to run demonstrations in Trymax application lab are
invited to contact Trymax.
* 200mm Fabs to Add 700,000 Wafers Through 2022, SEMI
Reports (Feb 12th, 2019)
About Trymax Semiconductor Equipment BV:
Trymax’s core business is to support semiconductor manufacturers through
the world with innovative plasma-based solutions for photo resist
removal, surface cleaning, isotropic etch, as well as UV curing/charge
erase, that are used in the fabrication of integrated circuits and other
semiconductor devices. Trymax is a privately held company headquartered
in Nijmegen, The Netherlands. Trymax operates regional offices in China
(Suzhou) and Italy (Milan). Learn more at www.trymax-semiconductor.com.
Global Marketing & Sales Director
24 350 08 09
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