ASML picked the capital above a consortium based around Eindhoven’s own university of technology. The Institute for Nanolithography will work on developing a new generation of chip machines based on extreme ultraviolet lithography.
The institute will be based in Amsterdam’s science park. ASML is putting €30m into the project over a 10-year period, the two universities €12.50m each. A further €50m investment is being made by other research groups.